First proportional valve terminal opens up new applications
6 September 2024 
Festo is offering what it describes as the first proportional valve terminal, delivering precision, fast response times and dynamic control. The VTEP terminal provides extremely sensitive pressure control – down to less than 1 millibar – and its use of precision piezo valves can halve compressed air consumption.
At less than 120mm wide, it is said to be the smallest proportional terminal for pressure control with 10 working channels. It is available in 2-, 3- or 5-way versions, which can be integrated for multi-channel applications. Pressure and vacuum can be combined in a 6-bar control range.
The VTEP’s piezo technology results in quiet, wear-free operation with no particle abrasion or heat generation. The terminal is also free of copper, nickel and zinc, making it suitable for sensitive applications.
Applications include web control for operations such as producing battery foils. It communicates almost in real time, with the valves reacting extremely rapidly to improve process reliability.
The terminal is said to speed up production and improve the quality of manufactured goods. When making semiconductor wafers, for example, the variable contact pressure of the individual polishing chambers can be controlled precisely using Festo’s Controlled Pneumatics technology, which combines the proportional technology with sensors and control algorithms to create control loops. The even pressure results in good performance across the entire wafer processing surface, even when polishing delicate wafers.
The VTEP terminals can also be used as pilot valves for media valves. In photolithography, for example, a light-resistant layer has to be precisely applied to wafers. A VTEP-controlled suck-back function ensures that no excess paint escapes.
Festo predicts that Controlled Pneumatics will open up new applications for pneumatics in terms of pressure, flow and movement, and make conventional production more efficient. Closed-loop control systems can be implemented by entering a few parameters.
